Activated Carbon for Phosphine Adsorption

Our Spherical activated carbon SS-1 for phosphine adsorption is produced using spherical synthetic polymer resin as its precursor and undergoes a proprietary pore-structure adjustment process. It is designed for use as an adsorbent in gas cylinders, with a controllable micropore structure and excellent mechanical strength, abrasion resistance, and purity.

SS-1 can withstand cryogenic temperatures below −100°C and maintains its structural integrity under temperature fluctuations without cracking or shedding carbon fines. Its performance is comparable to that of Kureha’s resin-based spherical activated carbon BAC-G70R.

SS-1 is suitable for the negative-pressure storage and transportation of electronic specialty gases, including arsine (AsH₃), phosphine (PH₃), diborane (B₂H₆), and boron trifluoride (BF₃), which are essential to ion implantation and doping processes in semiconductor wafer manufacturing, as well as etching, photolithography, and deposition processes.